? The machine is made of imported Roland collar plates, which can work in acid corrosive environments for a long time. It is sturdy and durable, with double layer leak proof.
? The structure adopts an external large acid tank for refrigeration and circulation to a small acid tank, which can corrode 4 ", 5", and 6 "silicon wafers.
? Fully automatic operation design, easy and safe operation.
? Temperature control capability RT~-20 ° C, temperature control accuracy ± 1 ° C.
? The patented design of the refrigeration coil ensures long-term use without corrosion, resulting in excellent direct cooling effect.
? Even Trenching, 130 μ M can reach ± 3 μ M.
? The control part adopts imported brand PLC and HMI;
? The front of the machine is equipped with one PTFE pure water gun and one PTFE nitrogen gun each placed on the right side.
? The equipment design standards are implemented in accordance with the semiconductor industry standard (SEMI-S2-93), and the ISO9001 quality management system is standardized and guaranteed.
? Domestic invention patent number: ZL20140082522.0
WuxiTel：0510-85853898
ShandongTel：0635-3999580
Phone：13671788984
Email：lsee@zglsee.com
Wuxi Base：Qingyun Building 3, No. 99 Furong Middle Third Road, Xishan Science and Technology Innovation Park, Wuxi City, Jiangsu Province
Shandong Base：No.1 Renhe West Road, Gaotang Development Zone, Shandong
